Introduction to Semico nductor Manufacturing and FA Process
· • The typical wafer supplied from ''wafer fab'' is 600 to 750μm thick. • Wafer thinned down to the required thickness, 50um to 75um, by abrasive grinding wheel. › 1st step : Use a large grit to coarsely grind the wafer and remove the bulk of the excess wafer thickness. › 2nd step : Use a finer grit to polish the wafer .